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Title:
加熱装置及びサセプタの温度を増加させる方法
Document Type and Number:
Japanese Patent JP4533984
Kind Code:
B2
Abstract:
A technique for heating a substrate support, such as a susceptor, includes establishing respective final temperature setpoints for first and second heating elements in the susceptor. The temperatures of the heating elements are raised to their respective final temperature setpoints based on a predetermined heating rate. The temperatures of the first and second heating elements are controlled so that the difference between the temperatures of the first and second heating elements does not exceed the predetermined value while the temperatures of the heating elements are raised to their respective final temperature setpoints. Controlling the temperatures includes setting interim setpoints for the first and second heating elements, where the interim setpoint for the heating element having the greater heating capacity depends on the current value of the interim setpoint of the other heating element and the predetermined value. The temperatures of the first and second heating elements are raised toward their respective interim temperature setpoints for a predetermined delay period. At the end of the delay period, new interim setpoints can be established and the process repeated until the temperature of at least one of the first and second heating elements is close to its respective final setpoint. A relatively high duty cycle can be achieved which also reduces the likelihood of deformation of the substrate support.

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Inventors:
Beer, emmanuel
Shen, Duo Yang
Zohar, Eitan
Cole rack, Mark, M.
Application Number:
JP2000559058A
Publication Date:
September 01, 2010
Filing Date:
July 13, 1999
Export Citation:
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Assignee:
AK Co., Ltd.
International Classes:
C03B32/00; H01L21/205; C03B29/02; C23C16/46; G05D23/19; H01L21/00
Domestic Patent References:
JP10178004A
JP10144655A
JP62295418A
JP8045946A
JP8302474A
JP6077148A
JP9007963A
JP9134886A
JP8003749A
JP9321105A
JP11003863A
JP10183353A
JP51015835A
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yuichi Yamada
Ikeda adult
Yasuhito Suzuki



 
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