Title:
変位素子
Document Type and Number:
Japanese Patent JP4534988
Kind Code:
B2
Abstract:
A displacement element having a beam in a state of being supported at its opposite ends and having the excellent controllability of an absolute position in an initial state. In the beam (12) formed such that a plurality of functional material layers (13 to 16) are stacked on each other in the thickness direction, a thickness adding member (27) is disposed at the center part (26) of the effective deflection portion (25) thereof, and the effective deflection portion (25) is made symmetrical with respect to the perpendicular bisector face (28) of a length between first fulcrum (23) and a second fulcrum (24). The first one side deflection portion (30) is made symmetrical with respect to the perpendicular bisection face (31) of a length between the first fulcrum (23) and a first inner end (29) and the second one side deflection portion (33) is made symmetrical with respect to the perpendicular bisector face (34) of a length between the second fulcrum (24) and a second inner end (32).
Inventors:
Masanobu Nomura
Application Number:
JP2005515737A
Publication Date:
September 01, 2010
Filing Date:
September 22, 2004
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
H01G7/00; H01G5/01; H01G5/16; H01L41/09; H01L41/187; H02K33/00; H02N1/00; H02N2/00
Domestic Patent References:
| JP2001280971A | 2001-10-10 | |||
| JPH10318758A | 1998-12-04 | |||
| JPH11211748A | 1999-08-06 | |||
| JP2003264123A | 2003-09-19 |
Attorney, Agent or Firm:
Masaaki Koshiba