Title:
チタンまたはチタン合金のエッチング液
Document Type and Number:
Japanese Patent JP4535232
Kind Code:
B2
Inventors:
Kenichi Takahashi
Hosomi Akira
Kuwahara Eiko
Hosomi Akira
Kuwahara Eiko
Application Number:
JP2003386389A
Publication Date:
September 01, 2010
Filing Date:
November 17, 2003
Export Citation:
Assignee:
Mitsubishi Gas Chemical Co., Ltd.
International Classes:
C23F1/44; C23F1/38; H01L21/308
Domestic Patent References:
| JP2000311891A | ||||
| JP8013166A | ||||
| JP8053781A | ||||
| JP2002155382A | ||||
| JP55138078A | ||||
| JP2002053984A | ||||
| JP6310492A |
Attorney, Agent or Firm:
Takashi Nagai