Title:
試料観察装置、エッジ位置算出装置、及びプログラム
Document Type and Number:
Japanese Patent JP4536004
Kind Code:
B2
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Inventors:
Masayuki Kurihara
Application Number:
JP2005503974A
Publication Date:
September 01, 2010
Filing Date:
January 21, 2004
Export Citation:
Assignee:
Advantest Corporation
International Classes:
G01B15/00; H01J37/22; H01J37/28
Domestic Patent References:
| JP2001221625A | 2001-08-17 | |||
| JPH07272994A | 1995-10-20 | |||
| JP2001108431A | 2001-04-20 | |||
| JP2002288661A | 2002-10-04 |
Attorney, Agent or Firm:
Akihiro Ryuka