Title:
溶液の塗布装置及び塗布方法
Document Type and Number:
Japanese Patent JP4538002
Kind Code:
B2
Inventors:
Takahiro Yamazaki
Application Number:
JP2006536963A
Publication Date:
September 08, 2010
Filing Date:
April 25, 2006
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
B05C5/00; B05C11/10; B05D1/26; G02F1/1337
Domestic Patent References:
| JP2002225259A | 2002-08-14 | |||
| JPH10151748A | 1998-06-09 | |||
| JP2005296854A | 2005-10-27 |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Sadao Muramatsu
Satoshi Kono
Makoto Nakamura
Sadao Muramatsu