Title:
感光性ポリイミド樹脂組成物
Document Type and Number:
Japanese Patent JP4541944
Kind Code:
B2
More Like This:
Inventors:
Maruyama Mitsunori
Kurishima Susumu
Kurishima Susumu
Application Number:
JP2005087945A
Publication Date:
September 08, 2010
Filing Date:
March 25, 2005
Export Citation:
Assignee:
Kimoto Co., Ltd.
International Classes:
G03F7/023; C08G73/10; G03F7/075; H01L21/027
Domestic Patent References:
| JP64000950A | ||||
| JP5005996A | ||||
| JP6128375A |
Attorney, Agent or Firm:
Koji Matsuyama
Masayuki Nakatani
Masayuki Nakatani