Title:
可変フィルタ素子、可変フィルタモジュール、およびこれらの製造方法
Document Type and Number:
Japanese Patent JP4542117
Kind Code:
B2
Abstract:
A variable filter element and a variable filter module suitable for decreasing the drive voltage are provided. The variable filter element includes a substrate, two ground lines and a signal line between the ground lines, where these lines are disposed to extend in parallel on the substrate. The filter element further includes movable capacitor electrodes which bridge between the ground lines and have portions facing the signal line, drive electrodes which are located between the signal line and the ground lines and generate electrostatic attraction with the movable capacitor electrodes, and a ground line, which is disposed in the substrate, has a portion facing the signal line, and is electrically connected with the ground. The variable capacitor electrodes and the ground line constitute ground interconnection portions, and the signal line and ground interconnection portion constitute a distributed constant transmission line.
Inventors:
Miyoshio
Takeaki Shimauchi
Masahiko Imai
Ueda Tomofumi
Yoshio Sato
Takeaki Shimauchi
Masahiko Imai
Ueda Tomofumi
Yoshio Sato
Application Number:
JP2007118583A
Publication Date:
September 08, 2010
Filing Date:
April 27, 2007
Export Citation:
Assignee:
富士通株式会社
International Classes:
H01P1/203; B81B3/00; H01P11/00; H03H7/12
Domestic Patent References:
| JP2003234606A | ||||
| JP2004040257A | ||||
| JP2005277675A | ||||
| JP2005142982A | ||||
| JP2004363961A |
Other References:
L.Dussopt and G.M.Rebeiz,An X- to ku-band 3-bit digital MEMS varactor,IEEE Microwave and Wireless Components Letters,米国,IEEE,2003年 9月,Vol.13, No.9,pp.361 - 363
Attorney, Agent or Firm:
Minoru Yoshida
Tatsuya Tanaka
Tatsuya Tanaka