Title:
微細構造転写装置
Document Type and Number:
Japanese Patent JP4542167
Kind Code:
B2
Abstract:
A fine structure imprinting machine is provided which can surely and easily eliminate static electricity in removing a stamper from an imprinting object. The fine structure imprinting machine is adapted to bring the stamper with a fine concavo-convex pattern formed thereon into contact with the imprinting object, thereby to imprint the fine concavo-convex pattern of the stamper onto a surface of the imprinting object. The stamper has a conductive film on at least a pattern formation surface thereof. The stamper is fixed by a conductive holding member, the conductive film is connected to the holding member via the conductor, and the holding member is connected to a ground within the machine.
Inventors:
Ryuta Washiya
Takuji Ando
Masahiko Ogino
Rei Shizawa
Kyoichi Mori
Akihiro Miyauchi
Takuji Ando
Masahiko Ogino
Rei Shizawa
Kyoichi Mori
Akihiro Miyauchi
Application Number:
JP2008089849A
Publication Date:
September 08, 2010
Filing Date:
March 31, 2008
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
B29C59/02; B29C33/38; B29C33/42; H01L21/027
Domestic Patent References:
| JP2007150072A | ||||
| JP200798779A | ||||
| JP2002079522A | ||||
| JP2006294167A |
Attorney, Agent or Firm:
Yusuke Hiraki