Title:
欠陥検査方法及び欠陥検査装置
Document Type and Number:
Japanese Patent JP4543153
Kind Code:
B1
Inventors:
Konishi Masami
Atsushi Fujii
Atsushi Fujii
Application Number:
JP2009186910A
Publication Date:
September 15, 2010
Filing Date:
August 11, 2009
Export Citation:
Assignee:
Okayama University
International Classes:
G01N21/88; G01B11/24; G06T1/00
Domestic Patent References:
| JP2000074644A | ||||
| JP2001264032A | ||||
| JP2003015024A | ||||
| JP2004191283A | ||||
| JP2008164461A | ||||
| JP2002122774A |
Attorney, Agent or Firm:
Juichiro Yano