Title:
蒸着材料の供給・回収手段及び真空装置
Document Type and Number:
Japanese Patent JP4543198
Kind Code:
B2
Inventors:
Shinji Fujioka
Shigeru Otani
Tatsushi Ishigami
Nobuo Kimura
Chihiro Okamoto
Shigeru Otani
Tatsushi Ishigami
Nobuo Kimura
Chihiro Okamoto
Application Number:
JP2004211188A
Publication Date:
September 15, 2010
Filing Date:
July 20, 2004
Export Citation:
Assignee:
Showa Vacuum Co., Ltd.
International Classes:
C23C14/24
Domestic Patent References:
| JP61012024A | ||||
| JP2003253432A |
Attorney, Agent or Firm:
Masao Okabe
Nobuaki Kato
Kazuo
Shinichi Usui
Takao Ochi
Teruhisa Motomiya
Asahi Shinmitsu
Katsumi Miyama
Nobuaki Kato
Kazuo
Shinichi Usui
Takao Ochi
Teruhisa Motomiya
Asahi Shinmitsu
Katsumi Miyama