Title:
ニオブ酸チタン酸ジルコン酸鉛積層体
Document Type and Number:
Japanese Patent JP4543985
Kind Code:
B2
Abstract:
A lead zirconate titanate niobate laminate includes a sapphire substrate and a lead zirconate titanate niobate film formed on the sapphire substrate.
Inventors:
Ken Kijima
Higuchi Tenkou
Higuchi Tenkou
Application Number:
JP2005086188A
Publication Date:
September 15, 2010
Filing Date:
March 24, 2005
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H03H9/25; C01G33/00; C30B1/02; C30B29/32; H01L41/09; H01L41/187; H01L41/318; H01L41/39; H03B5/30; H03H9/64
Domestic Patent References:
| JP2005057065A | ||||
| JP2001080995A | ||||
| JP2001127354A | ||||
| JP61274342A | ||||
| JP2004259869A |
Other References:
C. K. BARLINGAY et al.,Observation of sol-gel solid phase epitaxial growth of ferroelectric Pb(Nb,Zr,Ti)O3 thin films on sapphire,Applied Physics letters,1992年 9月14日,Vol.61,p.1278-1280
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka
Takekoshi Noboru
Osamu Suzawa
Kazuhiko Miyasaka
Takekoshi Noboru