Title:
シャワーヘッド構造及び成膜処理装置
Document Type and Number:
Japanese Patent JP4544265
Kind Code:
B2
Inventors:
Toshio Takagi
Ken Sakuma
Yuji Kato
Kenji Matsumoto
Ken Sakuma
Yuji Kato
Kenji Matsumoto
Application Number:
JP2007124907A
Publication Date:
September 15, 2010
Filing Date:
May 09, 2007
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/31; C23C16/455; H01L21/3065
Domestic Patent References:
| JP5152208A | ||||
| JP2000012479A | ||||
| JP2001118798A | ||||
| JP11251249A | ||||
| JP2001196322A | ||||
| JP9232297A |
Attorney, Agent or Firm:
Akihiro Asai