Title:
パターン形成材料、並びにパターン形成装置及びパターン形成方法
Document Type and Number:
Japanese Patent JP4546393
Kind Code:
B2
Inventors:
Morimasa Sato
Application Number:
JP2005370231A
Publication Date:
September 15, 2010
Filing Date:
December 22, 2005
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/033; G03F7/004; G03F7/027; G03F7/029; G03F7/031; G03F7/20; G03F7/26; G03F7/32; H05K3/00
Domestic Patent References:
| JP2005258229A | ||||
| JP2005258431A | ||||
| JP2004101811A |
Foreign References:
| WO2000058788A1 |
Attorney, Agent or Firm:
Koichi Hirota
Yoshihiro Nagare
Naoko Matsuda
Yoshihiro Nagare
Naoko Matsuda