Title:
カーボンナノチューブからなる電気的に導電性の接続を有する電子部品とその製造方法
Document Type and Number:
Japanese Patent JP4549002
Kind Code:
B2
Abstract:
The invention provides in a preferred embodiment an electronic component comprising a first conductive layer, a non-conductive layer and a second conductive layer. A hole is etched through the non-conductive layer. A nanotube, which is provided in said hole, links the first conductive layer to the second conductive layer in a conductive manner.
Inventors:
Engel Heart, Manfrets
Henlein, Wolfgang
Kleuple, Franz
Henlein, Wolfgang
Kleuple, Franz
Application Number:
JP2001560448A
Publication Date:
September 22, 2010
Filing Date:
February 02, 2001
Export Citation:
Assignee:
Infineon Technologies AG
International Classes:
H01J9/02; H01L21/768; H01J1/304; H01L21/3205; H01L23/52; H01L23/522; H01L23/532; H05K3/40
Domestic Patent References:
| JP11194134A | ||||
| JP11297696A | ||||
| JP2000013029A | ||||
| JP2001177052A | ||||
| JP11139815A | ||||
| JP11330244A | ||||
| JP11297696A |
Attorney, Agent or Firm:
Kenzo Hara International Patent Office