Title:
超音波振動切削装置
Document Type and Number:
Japanese Patent JP4549822
Kind Code:
B2
Inventors:
Sosuke Kumagai
Application Number:
JP2004333519A
Publication Date:
September 22, 2010
Filing Date:
November 17, 2004
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B28D5/00; H01F38/14
Domestic Patent References:
| JP2004291636A | ||||
| JP5208349A | ||||
| JP2000210928A | ||||
| JP2004288961A | ||||
| JP2000260642A |
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara
Tetsuo Kanamoto
Koji Hagiwara