Title:
トーションバーを備えるマイクロ可動素子
Document Type and Number:
Japanese Patent JP4550578
Kind Code:
B2
Abstract:
The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.
Inventors:
Osamu Tsuboi
Yoshihiro Mizuno
Ueda Tomofumi
Ippei Sawaki
Okuda Hisao
Fumio Yamagishi
Hiromitsu Soneda
Takama Satoru
Yoshihiro Mizuno
Ueda Tomofumi
Ippei Sawaki
Okuda Hisao
Fumio Yamagishi
Hiromitsu Soneda
Takama Satoru
Application Number:
JP2004542790A
Publication Date:
September 22, 2010
Filing Date:
October 10, 2002
Export Citation:
Assignee:
富士通株式会社
International Classes:
G02B26/08; B81B3/00; H02N1/00
Domestic Patent References:
| JP2002258205A | 2002-09-11 | |||
| JP2002321196A | 2002-11-05 | |||
| JP2002321197A | 2002-11-05 | |||
| JP2002321198A | 2002-11-05 | |||
| JP2002228967A | 2002-08-14 |
Attorney, Agent or Firm:
Minoru Yoshida
Tatsuya Tanaka
Tatsuya Tanaka