Title:
誘導結合プラズマ処理装置
Document Type and Number:
Japanese Patent JP4554097
Kind Code:
B2
Inventors:
Kenji Amano
Application Number:
JP2001045556A
Publication Date:
September 29, 2010
Filing Date:
February 21, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/3065; H05H1/46; B01J19/08; C23C16/44; H01L21/205; H01L21/302
Domestic Patent References:
| JP9115895A | ||||
| JP2000235972A | ||||
| JP5343361A | ||||
| JP2001053069A | ||||
| JP2000340548A | ||||
| JP4228569A |
Attorney, Agent or Firm:
Hiroshi Takayama