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Patent Searching and Data


Title:
研磨布及び研磨布の製造方法
Document Type and Number:
Japanese Patent JP4555559
Kind Code:
B2
Abstract:
A polishing sheet which can improve waviness at a face of a material to be polished and which has a long life is provided. The polishing pad 1 has a polyurethane sheet 2 made of polyurethane resin. The polyurethane sheet 2 has a polishing layer which is disposed inside a surface layer and which is allowed to wear away by polishing and whose thickness is larger than a thickness of the surface layer. The polishing layer has an approximately uniform foam structure in a direction of the thickness of the polishing sheet 2 by being formed foams whose space volume is larger than that of foams formed at the surface layer and which are communicated so as to form a network by continuous holes.

Inventors:
Takahiro Kume
Tomohiro Iwao
Application Number:
JP2003393700A
Publication Date:
October 06, 2010
Filing Date:
November 25, 2003
Export Citation:
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Assignee:
Fujibo Holdings Co., Ltd.
International Classes:
B24B37/20; B24B37/24; B24D3/32; B24D11/00; B32B5/22; B32B27/40; C08J5/14; H01L21/304; C08L75/04
Domestic Patent References:
JP5008178A
JP7108454A
JP2002264006A
JP10249709A
JP2002075933A
JP11277408A
JP2003171433A
JP2002086343A
JP6220151A
Attorney, Agent or Firm:
Toshiaki Igarashi