Title:
変位装置
Document Type and Number:
Japanese Patent JP4562336
Kind Code:
B2
Abstract:
A positioning device comprising a first part (1) which is movable relatively to a second part (2) in an X-direction and a Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged according to a pattern of rows (7) and columns (8) extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row (7) and each column (8) rotates 90° counter-clockwise. The second part (2) comprises an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of +45°, and the other type having an offset of -45° with respect to the X-direction. The magnet configuration causes a very strong magnetic field.
Inventors:
Frithen, Petrus Sem
Comptel, Johann Se
Paynenburg, Antonius Theatre
Ropestra, Erikuel
Comptel, Johann Se
Paynenburg, Antonius Theatre
Ropestra, Erikuel
Application Number:
JP2001522649A
Publication Date:
October 13, 2010
Filing Date:
August 15, 2000
Export Citation:
Assignee:
Koninklijke Philips Electronics N.V.
AS M Netherlands B.V.
AS M Netherlands B.V.
International Classes:
G12B5/00; H02K41/03; G03F7/20; H01L21/027
Domestic Patent References:
| JP61288769A | ||||
| JP2000312465A |
Foreign References:
| US5886432 | ||||
| WO1999004481A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki