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Title:
転写用マスクデータ補正装置
Document Type and Number:
Japanese Patent JP4562374
Kind Code:
B2
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Inventors:
Kamon Kazuya
Application Number:
JP2003365882A
Publication Date:
October 13, 2010
Filing Date:
October 27, 2003
Export Citation:
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Assignee:
Renesas Electronics Corporation
International Classes:
G03F1/36; G03F1/68; G03F1/70; H01L21/027; H01L21/3205; H01L21/768; H01L23/522
Domestic Patent References:
JP2002031882A
JP2002313693A
JP2000075467A
JP61198978A
JP2003151891A
JP2000066365A
JP2000049338A
JP2003031469A
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita



 
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