Title:
薄膜の形成方法
Document Type and Number:
Japanese Patent JP4562811
Kind Code:
B2
Inventors:
Kazuyoshi Honda
Taiji Shinokawa
Hiromasa Yagi
Satoshi Shibuya
Sadayuki Okazaki
Hiroko Ogawa
Daisuke Suetsugu
Taiji Shinokawa
Hiromasa Yagi
Satoshi Shibuya
Sadayuki Okazaki
Hiroko Ogawa
Daisuke Suetsugu
Application Number:
JP2010519296A
Publication Date:
October 13, 2010
Filing Date:
December 10, 2009
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
C23C14/50; C23C14/24
Domestic Patent References:
| JP2005054212A | 2005-03-03 | |||
| JP4369531B2 | 2009-11-25 | |||
| JP4355032B2 | 2009-10-28 |
Attorney, Agent or Firm:
Patent business corporation Yuko patent office