To obtain a simplified laminated-structure smaller in size and achieve a high power of a synthetic vibration by eliminating the variations of laminated piezoelectric elements in the vibration direction and preventing a vibration loss.
The ultrasonic motor includes a piezoelectric bending vibration member which makes its bending vibration due to the application of a voltage and a piezoelectric stretching vibration member which is integrally laminated on the piezoelectric bending vibration member and makes its stretching vibration due to the application of a voltage. A movable body is moved by a synthetic vibration of the bending vibration of the piezoelectric bending vibration member and the stretching vibration of the piezoelectric stretching vibration member. Also, the ultrasonic motor includes: a first electrode which is provided at the portion of surfaces opposing the lamination surfaces of the piezoelectric bending vibration member in which the piezoelectric bending vibration member is to be polarization-processed; a second electrode which is provided at the portion of surfaces opposing lamination surfaces of the piezoelectric stretching vibration member in which the piezoelectric stretching vibration member is to be polarization processed; and a reference electrode which is provided at a lamination surface between the piezoelectric bending vibration member and piezoelectric stretching vibration member and serves as a reference for the first and second electrodes.
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