Title:
薄膜構造の特性評価を含む、偏光解析、反射光測定および散乱光測定のための干渉計法および走査式干渉計
Document Type and Number:
Japanese Patent JP4563811
Kind Code:
B2
Abstract:
A method including: imaging test light emerging from a test object over a range of angles to interfere with reference light on a detector, wherein the test and reference light are derived from a common source; for each of the angles, simultaneously varying an optical path length difference from the source to the detector between interfering portions of the test and reference light at a rate that depends on the angle at which the test light emerges from the test object; and determining an angle-dependence of an optical property of the test object based on the interference between the test and reference light as the optical path length difference is varied for each of the angles.
Inventors:
De Grote, Peter Jay.
Application Number:
JP2004534816A
Publication Date:
October 13, 2010
Filing Date:
September 09, 2003
Export Citation:
Assignee:
ZYGO CORPORATION
International Classes:
G01N21/45; G01B9/02; G01B11/06; G01N21/00; G01N21/21
Domestic Patent References:
| JP9218016A | ||||
| JP10002855A | ||||
| JP10325795A | ||||
| JP2000180124A | ||||
| JP2001141652A | ||||
| JP2001272603A |
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Atsushi Honda
Miho Ikegami
Makoto Onda
Atsushi Honda
Miho Ikegami