Title:
光画像計測装置及び光画像計測方法
Document Type and Number:
Japanese Patent JP4566685
Kind Code:
B2
Abstract:
The present invention relates to an optical image measuring apparatus for measuring the surface form or inner form of the object to be measured by using an optical heterodyne detection method to produce the image of the measured form. Provided is an optical image measuring apparatus forming a three-dimensional image based on tomographic images of an object, acquired at various depths even when the object moves during measurement. Including a half mirror (6) for dividing a light beam signal light (S) and reference light (R), a frequency shifter (8), a reference mirror (9) and a piezoelectric element (9A) used to change an optical path length of the reference light (R), CCDs (21,22) for receiving interference light beams (L) resulting from interference light produced by superimposing the signal light (S) and the reference light (R) on each other by the half mirror (6) and outputting detection signals, an image forming portion for forming tomographic images based on the detection signals, a measurement depth calculating means (53), and an image processing portion (57). Forming a three-dimensional image or the like based on the arranged tomographic images.
Inventors:
Chan Kimpui
Masahiro Akiba
Yasufumi Fukuma
Hiroyuki Otsuka
Hiroshi Tsukada
Kazuhiko Yumake
Masahiro Akiba
Yasufumi Fukuma
Hiroyuki Otsuka
Hiroshi Tsukada
Kazuhiko Yumake
Application Number:
JP2004299036A
Publication Date:
October 20, 2010
Filing Date:
October 13, 2004
Export Citation:
Assignee:
Topcon Co., Ltd.
International Classes:
G01N21/17; A61B3/10; A61B10/00; G01B11/24
Domestic Patent References:
| JP2003035660A | ||||
| JP2001066245A | ||||
| JP2003050199A | ||||
| JP2001330558A |
Other References:
春名正光、近江雅人,光コヒーレンストモグラフィ技術を利用した屈折率と厚さ同時測定,光技術コンタクト,2004年 2月20日,第42巻、第2号,第92頁-第97頁
Attorney, Agent or Firm:
Misawa patent office
Masayoshi Misawa
Masayoshi Misawa