Title:
冷陰極電離真空計
Document Type and Number:
Japanese Patent JP4568321
Kind Code:
B2
Abstract:
An ionization vacuum device measures a pressure in a vacuum vessel, and has: an anode provided inside the vacuum vessel; a cathode provided inside the vacuum vessel; a power source for discharge that supplies electric power for discharge between the anode and the cathode; a power source for cathode-heating that supplies power for heating to the cathode, means for forming a magnetic field in a space between the anode and the cathode; control means for controlling so as to heat said cathode by said power source for cathode-heating while discharge of gas inside said vacuum vessel is caused, and so as to maintain the temperature of said cathode within a temperature range where thermonic electrons are not emitted from said cathode.
Inventors:
Fumio Watanabe
Application Number:
JP2007305526A
Publication Date:
October 27, 2010
Filing Date:
November 27, 2007
Export Citation:
Assignee:
Limited company vacuum laboratory
International Classes:
G01L21/34
Domestic Patent References:
| JP11086777A | ||||
| JP60000534U | ||||
| JP52026259A | ||||
| JP7072030A | ||||
| JP2003178669A | ||||
| JP7005061A | ||||
| JP2004155613A | ||||
| JP2000039375A | ||||
| JP2218933A | ||||
| JP61226628A | ||||
| JP2005062176A | ||||
| JP60089052A | ||||
| JP7182969A |
Attorney, Agent or Firm:
Keizo Okamoto