Title:
バイパス一体型流体センサ装置およびその製造方法
Document Type and Number:
Japanese Patent JP4568763
Kind Code:
B2
Abstract:
A micromachined fluid sensing device and a method for its fabrication. The sensing device incorporates a bypass passage, preferably an integral bypass passage within the device, that enables a volume of fluid to be delivered to the device, with a limited portion of the fluid passing through a passage within the device in which one or more properties of the fluid are sensed, such as but not limited to density, specific gravity, and chemical concentrations. The device is suitable for monitoring the fuel concentration in a fuel mixture for a fuel cell.
Inventors:
Sparks, douglas, ray
Najafi, Nader
Najafi, Nader
Application Number:
JP2007554075A
Publication Date:
October 27, 2010
Filing Date:
December 01, 2005
Export Citation:
Assignee:
Integrated Sensing Systems, Inc.
International Classes:
G01N9/00; B81B3/00; G01N37/00
Domestic Patent References:
| JP44018531B1 | ||||
| JP2003057252A | ||||
| JP10038788A | ||||
| JP5500417A | ||||
| JP2004294090A | ||||
| JP2002055036A | ||||
| JP63262526A | ||||
| JP2004061426A | ||||
| JP11005029A |
Attorney, Agent or Firm:
Kameda Tetsuaki