Title:
熱処理炉
Document Type and Number:
Japanese Patent JP4570345
Kind Code:
B2
Inventors:
Toshihiro Kaminaga
Atsushi Okuno
Takakuwa Yasunori
Atsushi Okuno
Takakuwa Yasunori
Application Number:
JP2003325523A
Publication Date:
October 27, 2010
Filing Date:
September 18, 2003
Export Citation:
Assignee:
Sanko Co., Ltd.
Kokusai Electric Semiconductor Service Co., Ltd.
Kokusai Electric Semiconductor Service Co., Ltd.
International Classes:
H01L21/22; H05B3/64; F27D11/02; H01L21/205
Domestic Patent References:
| JP2001513871A | ||||
| JP40000056Y1 | ||||
| JP59036196U | ||||
| JP58186188A | ||||
| JP9092444A |
Attorney, Agent or Firm:
Ryuji Takahashi
Shigeyuki Motoi
Toru Yui
Aniya Setsuo
Hitoshi Kiyono
Shigeyuki Motoi
Toru Yui
Aniya Setsuo
Hitoshi Kiyono