Title:
レジスト組成物
Document Type and Number:
Japanese Patent JP4574067
Kind Code:
B2
Inventors:
Shinji Yamana
Hideo Haneda
Takeshi Iwai
Hideo Haneda
Takeshi Iwai
Application Number:
JP2001174518A
Publication Date:
November 04, 2010
Filing Date:
June 08, 2001
Export Citation:
Assignee:
Renesas Electronics Corporation
Tokyo Ohka Kogyo Co., Ltd.
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/039; C08F220/28; G03F7/004; H01L21/027
Domestic Patent References:
| JP2000267287A | ||||
| JP2001027807A | ||||
| JP2000187329A | ||||
| JP2000066396A | ||||
| JP2002351063A | ||||
| JP2001109156A | ||||
| JP2002182393A |
Attorney, Agent or Firm:
Kato Asamichi