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Title:
塗布装置の洗浄方法
Document Type and Number:
Japanese Patent JP4577964
Kind Code:
B2
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Inventors:
Koichi Nagasawa
Kazuma Teramoto
Application Number:
JP2000266613A
Publication Date:
November 10, 2010
Filing Date:
September 04, 2000
Export Citation:
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Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
B08B9/027; B05B15/02; B05C11/10; B05D3/10; B08B3/08; H01L21/027; H01L21/304
Domestic Patent References:
JP6320128A
JP11102854A
JP2000157939A
Attorney, Agent or Firm:
Yu Koyama



 
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