Title:
強誘電体キャパシタの製造方法
Document Type and Number:
Japanese Patent JP4578774
Kind Code:
B2
Abstract:
A ferroelectric capacitor includes a pair of electrodes, and at least one ferroelectric held between the pair of electrodes, in which the ferroelectric includes a first ferroelectric layer having a surface roughness (RMS) determined with an atomic force microscope of 10 nm or more; and a second ferroelectric layer being arranged adjacent to the first ferroelectric layer and having an RMS of 5 nm or less. A process produces such a ferroelectric capacitor by forming a first ferroelectric layer on or above one of a pair of electrodes at a temperature equal to or higher than a crystallization temperature at which the first ferroelectric layer takes on a ferroelectric crystalline structure, and forming a second ferroelectric layer on the first ferroelectric layer at a temperature lower than a crystallization temperature at which the second ferroelectric layer takes on a ferroelectric crystalline structure.
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Inventors:
Shumu Matsuura
Kenji Maruyama
Takai Kazuaki
Kenji Maruyama
Takai Kazuaki
Application Number:
JP2003002577A
Publication Date:
November 10, 2010
Filing Date:
January 08, 2003
Export Citation:
Assignee:
富士通株式会社
International Classes:
C23C14/08; H01L21/8246; C23C16/40; G01Q30/04; G01Q30/10; G01Q70/04; G01Q70/14; H01L21/02; H01L21/316; H01L27/105; H01L27/115
Domestic Patent References:
| JP2002016234A | ||||
| JP8212830A | ||||
| JP2000040799A | ||||
| JP8031951A | ||||
| JP2000101033A |
Attorney, Agent or Firm:
Koichi Hirota