Title:
エッチング方法及びエッチング装置
Document Type and Number:
Japanese Patent JP4578887
Kind Code:
B2
Inventors:
Masahiko Tanaka
Yoshiyuki Nozawa
Chiya Mitsuya
Yoshiyuki Nozawa
Chiya Mitsuya
Application Number:
JP2004234598A
Publication Date:
November 10, 2010
Filing Date:
August 11, 2004
Export Citation:
Assignee:
Sumitomo Precision Products Co., Ltd.
International Classes:
H01L21/3065
Domestic Patent References:
| JP2000299310A | ||||
| JP2003092286A | ||||
| JP10144654A | ||||
| JP2001505001A |
Attorney, Agent or Firm:
Satoshi Murakami