放電表面処理用電極の製造方法及び該電極並びに放電表面処理方法

Title:

放電表面処理用電極の製造方法及び該電極並びに放電表面処理方法

Document Type and Number:

Japanese Patent JP4580250

Kind Code:

B2

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Inventors:

Akihiro Goto
Hiroyuki Teramoto
Kazushi Nakamura

Application Number:

JP2005026260A

Publication Date:

November 10, 2010

Filing Date:

February 02, 2005

Export Citation:

Assignee:

Mitsubishi Electric Corporation
Ihi Co., Ltd.

International Classes:

C23C26/00

Domestic Patent References:

Foreign References:

WO2004111305A1

Attorney, Agent or Firm:

Shogo Takahashi
Tadahiko Inaba
Kanako Murakami
Nakatsuru Kazutaka

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