Title:
フィルム状基板のプラズマエッチング装置
Document Type and Number:
Japanese Patent JP4580503
Kind Code:
B2
Inventors:
Hideo Takei
Michio Ishikawa
Kabun Ota
Masashi Kikuchi
Hitoshi Ikeda
Ozono Miyabi
Michio Ishikawa
Kabun Ota
Masashi Kikuchi
Hitoshi Ikeda
Ozono Miyabi
Application Number:
JP2000145532A
Publication Date:
November 17, 2010
Filing Date:
May 17, 2000
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H01L21/302; H01L21/3065; H01L21/683
Domestic Patent References:
| JP11111830A | ||||
| JP62219915A | ||||
| JP61171127A | ||||
| JP10326831A | ||||
| JP62109319A | ||||
| JP60126835A | ||||
| JP11111682A | ||||
| JP1196827A | ||||
| JP3036724A | ||||
| JP3177020A | ||||
| JP11224876A | ||||
| JP10312995A | ||||
| JP62297477A | ||||
| JP8148471A |
Attorney, Agent or Firm:
Takao Hamano
Teruichi Hirai
Teruichi Hirai