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Patent Searching and Data


Title:
圧電駆動型MEMS装置
Document Type and Number:
Japanese Patent JP4580745
Kind Code:
B2
Inventors:
池 橋 民 雄
Application Number:
JP2004355240A
Publication Date:
November 17, 2010
Filing Date:
December 08, 2004
Export Citation:
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Assignee:
株式会社東芝
International Classes:
B81B3/00; H01G7/06; H01H57/00; H01L41/08; H01L41/09; H01L41/187
Domestic Patent References:
JP8162006A
JP2004111360A
JP2004061486A
Foreign References:
WO2004017119A1
Attorney, Agent or Firm:
吉武 賢次
橘谷 英俊
佐藤 泰和
吉元 弘
川崎 康