Title:
柱状金属体の形成方法及び多層配線基板の製造方法
Document Type and Number:
Japanese Patent JP4582277
Kind Code:
B2
Inventors:
Eiji Yoshimura
Application Number:
JP2001155822A
Publication Date:
November 17, 2010
Filing Date:
May 24, 2001
Export Citation:
Assignee:
Denka agsp corporation
International Classes:
C25D5/02; H05K3/46; C23F1/00; C25D7/00; H05K3/40
Domestic Patent References:
| JP6314878A | ||||
| JP3108798A | ||||
| JP653660A | ||||
| JP923064A | ||||
| JP1098268A | ||||
| JP5110229A |
Foreign References:
| WO2000052977A1 |
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office
Yuzo Ozaki
Koichi Kajisaki
Toshihiko Taniguchi
Yuzo Ozaki
Koichi Kajisaki
Toshihiko Taniguchi