Title:
縞画像解析誤差検出方法および縞画像解析誤差補正方法
Document Type and Number:
Japanese Patent JP4583619
Kind Code:
B2
Abstract:
Fringe image data obtained by use of the phase shift method is Fourier-transformed, so as to determine the carrier frequency and the complex amplitude which occur due to the deviation between the respective wavefronts from the object to be observed and a reference. According to the carrier frequency and the complex amplitude, the amount of translational displacement of phase shift and the amount of inclination are detected, so as to correct the results determined by the phase shift method. Thus, the influences of errors in the amount of inclination/amount of displacement in the phase shift element can be eliminated easily.
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Inventors:
Kudzu Sou
Application Number:
JP2001022633A
Publication Date:
November 17, 2010
Filing Date:
January 31, 2001
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G01B11/24; G01B9/02; G01B11/00; G01B11/26; G01M11/02
Domestic Patent References:
| JP4264205A | ||||
| JP7083637A | ||||
| JP9250907A | ||||
| JP61230002A |
Attorney, Agent or Firm:
Kazunori Kobayashi