基板保持装置、研磨装置、及び該基板保持装置に用いられる弾性部材

Title:

基板保持装置、研磨装置、及び該基板保持装置に用いられる弾性部材

Document Type and Number:

Japanese Patent JP4583729

Kind Code:

B2

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Inventors:

Tetsuji Togawa
Hiroshi Yoshida
Osamu Nabeya
Makoto Fukushima
Koichi Fukaya

Application Number:

JP2003163052A

Publication Date:

November 17, 2010

Filing Date:

June 06, 2003

Export Citation:

Assignee:

Ebara Corporation

International Classes:

H01L21/304; B24B37/005; B24B37/04; B24B37/30; B24B37/32

Domestic Patent References:

Foreign References:

WO2002007931A1

Attorney, Agent or Firm:

Tetsuya Hirosawa
Isamu Watanabe
Shintaro Hotta
Ryoji Kosugi
Tomohiro Mori

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