Title:
電鋳による冷却および熱交換システムの製造
Document Type and Number:
Japanese Patent JP4584261
Kind Code:
B2
Abstract:
A process for fabricating a metallic component is disclosed. The process includes performing multiple electroforming steps on an object to form metallic layers. The process includes performing between the electroforming steps masking and patterning steps using a non-conductive material. The resulting metallic component has either a single layer or multiple layers of cooling or heat transfer channels, which may be at right angles in adjacent layers. The non-conductive material can be removed during the process by a solvent or by melting. The object on which the metallic component is formed may be a flat or shaped mandrel from which the metallic component can be removed. The metallic component is particularly useful in forming optical components for use in extreme ultraviolet (EUV) systems and in cooling and heat transfer systems.
Inventors:
Banam Robert David
Valenzuela Arnold
Valenzuela Arnold
Application Number:
JP2006540364A
Publication Date:
November 17, 2010
Filing Date:
November 23, 2004
Export Citation:
Assignee:
MEDIA LARIO S.R.L.
International Classes:
C25D1/02; C25D1/00; C25D1/08; C25D1/22; F28D7/16
Domestic Patent References:
| JP61210636A | ||||
| JP6034283A |
Foreign References:
| WO2003049514A1 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato
Fumiaki Otsuka
Shishido Kaichi
Disciple Maru Ken
Ino Sato