Title:
半導体装置
Document Type and Number:
Japanese Patent JP4588483
Kind Code:
B2
Inventors:
Tomohiro Yamashita
Hayashidake
Kiyoshi Hayashi
Shuichi Oda
Hayashidake
Kiyoshi Hayashi
Shuichi Oda
Application Number:
JP2005043822A
Publication Date:
December 01, 2010
Filing Date:
February 21, 2005
Export Citation:
Assignee:
Renesas Electronics Corporation
International Classes:
H01L21/8234; H01L21/28; H01L21/768; H01L21/8238; H01L27/088; H01L27/092; H01L29/417; H01L29/423; H01L29/49
Domestic Patent References:
| JP2002359295A | ||||
| JP2003023100A | ||||
| JP2003152102A | ||||
| JP2004289061A | ||||
| JP2002280461A | ||||
| JP2001060630A | ||||
| JP2003309188A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita