Title:
瞳フィルタ及びパターン形成方法並びに投影露光装置
Document Type and Number:
Japanese Patent JP4589489
Kind Code:
B2
More Like This:
Inventors:
Tadashi Fujimoto
Application Number:
JP2000203623A
Publication Date:
December 01, 2010
Filing Date:
July 05, 2000
Export Citation:
Assignee:
Renesas Electronics Corporation
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP5217852A | ||||
| JP5160002A | ||||
| JP9251949A | ||||
| JP6177006A | ||||
| JP5198474A |
Attorney, Agent or Firm:
Shinji Hayami
Kana Nomoto
Satoshi Amagi
Kana Nomoto
Satoshi Amagi