Title:
圧力センサ、圧力測定装置およびチャンバで圧力をモニタするための方法
Document Type and Number:
Japanese Patent JP4590100
Kind Code:
B2
Abstract:
In order to cover a large measuring range extending from about 10-6 mbar to about 10 bar, a simple, compact and economically producible pressure sensor (3) arranged in a protective tube (1) has, on a support plate (5), a ceramic membrane (6) which, together with the support plate (5), forms a capacitive measuring element for the determination of pressures between about 0.1 mbar and 10 bar, and two measuring wires (11, 12) which are arranged adjacent to the membrane (6) and constitute a Pirani measuring element with substantial compensation of the effect of the wall temperature, for the determination of pressures between about 10-6 mbar and 1 mbar. The membrane (6) is shielded from the radiation of the measuring wires (11, 12) by a protective ring (16).
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Inventors:
Beruhiri, Urs
Björkman, Pell
Stocker, rudolf
Gartner, Marcel
Björkman, Pell
Stocker, rudolf
Gartner, Marcel
Application Number:
JP2000560427A
Publication Date:
December 01, 2010
Filing Date:
July 16, 1999
Export Citation:
Assignee:
Inficon GmbH
International Classes:
G01L9/12; G01L9/00; G01L21/12
Domestic Patent References:
| JP10009979A | ||||
| JP59214727A | ||||
| JP34005989Y1 | ||||
| JP2731009B2 | ||||
| JP7209122A | ||||
| JP3197832A |
Foreign References:
| US3064478 |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa