Title:
より高い正確度の圧力に基づく流れコントローラ
Document Type and Number:
Japanese Patent JP4594728
Kind Code:
B2
Abstract:
A mass flow controller is disclosed and includes body portion having a first internal passage and at least second internal passage formed therein, a flow control valve coupled to the body portion and in communication with the first and second internal passages, at least one pressure transducer coupled to the body portion and in communication with at least one of the first internal passage, the second internal passage, and the flow restrictor, a nonlinear flow restrictor configured to produce a high compressible laminar flow therethrough coupled to the second internal passage, a thermal sensor in communication with at least one of the first internal passage, the second internal passage, and the flow restrictor, and an exhaust vessel in communication with the flow restrictor.
Inventors:
Mud, Daniel Tea.
White, William W.
White, William W.
Application Number:
JP2004531988A
Publication Date:
December 08, 2010
Filing Date:
August 28, 2003
Export Citation:
Assignee:
HORIBA STEC, INC.
International Classes:
G05D7/06
Domestic Patent References:
| JP2000137527A | ||||
| JP2001142539A | ||||
| JP6454220A | ||||
| JP76860A |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita