Title:
基板生産システム及びそのシステムを制御するプログラム
Document Type and Number:
Japanese Patent JP4596702
Kind Code:
B2
Inventors:
Tsutomu Katayiki
Application Number:
JP2001252222A
Publication Date:
December 15, 2010
Filing Date:
August 23, 2001
Export Citation:
Assignee:
JUKI Corporation
International Classes:
G05B19/418; H05K13/04
Domestic Patent References:
| JP2002526850A | ||||
| JP11232339A | ||||
| JP10013100A | ||||
| JP7249092A |
Attorney, Agent or Firm:
Satoshi Takaya
Keisuke Matsuyama
Tsuyoshi Makino
Taku Kato
Keisuke Matsuyama
Tsuyoshi Makino
Taku Kato