Title:
レジスト材料及びパターン形成方法
Document Type and Number:
Japanese Patent JP4600681
Kind Code:
B2
Inventors:
Seiichiro Tachibana
Tsunehiro Nishi
Shigehiro Nakura
Tsuyoshi Kanao
Tsunehiro Nishi
Shigehiro Nakura
Tsuyoshi Kanao
Application Number:
JP2006078655A
Publication Date:
December 15, 2010
Filing Date:
March 22, 2006
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
G03F7/039; H01L21/027
Domestic Patent References:
| JP2003292547A | ||||
| JP2004004697A | ||||
| JP2005321765A | ||||
| JP2005133065A | ||||
| JP2006022259A |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa