Title:
化学増幅型ポジ型レジスト組成物
Document Type and Number:
Japanese Patent JP4604367
Kind Code:
B2
Inventors:
Junji Nakanishi
Lee
Lee
Application Number:
JP2001053967A
Publication Date:
January 05, 2011
Filing Date:
February 28, 2001
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/039; G03F7/004; H01L21/027
Domestic Patent References:
| JP2000298349A | ||||
| JP2000171967A | ||||
| JP11282167A | ||||
| JP11352672A | ||||
| JP11265067A |
Attorney, Agent or Firm:
Toru Nakayama