Title:
変位測定装置
Document Type and Number:
Japanese Patent JP4608274
Kind Code:
B2
Abstract:
An interferometric fiber optic encoder readhead for sensing the displacement of a scale grating is disclosed. The detector channels (190A-190C) of the readhead are fiber optic detector channels having respective phase grating masks (120A-120C). The fiber optic encoder readhead is configured to detect the displacement of interference fringes arising from the scale grating. In various exemplary embodiments, the fiber optic readhead is constructed and operably positioned according to various design relationships that insure a compact mounting and a relatively ideal sinusoidal signal as a function of displacement. Accordingly, high levels of displacement signal interpolation may be achieved, allowing sub-micrometer displacement measurements. The fiber optic encoder readhead may be assembled in a particularly accurate and economical manner and may be provided in a package with dimensions on the order of 1-2 millimeters.
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Inventors:
Joseph Diet Byason
Application Number:
JP2004288056A
Publication Date:
January 12, 2011
Filing Date:
September 30, 2004
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B11/00; G01D5/38; G01D5/347
Domestic Patent References:
| JP2004053605A | ||||
| JP6085317A | ||||
| JP25022U |
Foreign References:
| US5909283 |
Attorney, Agent or Firm:
Intellectual Property Office
Kinoshita Minoru
Kanji Nakayama
Tsuyoshi Ishizaki
Kinoshita Minoru
Kanji Nakayama
Tsuyoshi Ishizaki