Title:
板状物に形成された電極の加工装置,板状物に形成された電極の加工方法,及び板状物に形成された電極の加工装置のチャックテーブルの平面度測定方法
Document Type and Number:
Japanese Patent JP4615225
Kind Code:
B2
Inventors:
Hiroaki Hiraide
Application Number:
JP2004004170A
Publication Date:
January 19, 2011
Filing Date:
January 09, 2004
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/304
Domestic Patent References:
| JP2002289563A | ||||
| JP2000173954A | ||||
| JP2000216122A |
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara
Tetsuo Kanamoto
Koji Hagiwara