Title:
非蒸発性ゲッターによるポンプ装置およびこのゲッターの使用法
Document Type and Number:
Japanese Patent JP4620187
Kind Code:
B2
Abstract:
The invention discloses a pumping device by non-vaporizable getter to create a very high vacuum in a chamber defined by a metal wall capable of releasing gas at its surface, characterized in that it comprises a thin layer of non-vaporizable getter coated on at least almost the whole metal wall surface defining the chamber.
Inventors:
Benvenuti, Cristoforo
Application Number:
JP50227698A
Publication Date:
January 26, 2011
Filing Date:
June 18, 1997
Export Citation:
Assignee:
ORGANISATION EUROPEENNE POUR LA RECHERCHE NUCLEAIRE
International Classes:
F04B37/02; H05H7/00; H01J7/18; H01J9/18; H01J41/12; H05H13/04
Attorney, Agent or Firm:
Masaki Akatsuka
Akio Miyazaki
Ishibashi Masayuki
Masaaki Ogata
Akio Miyazaki
Ishibashi Masayuki
Masaaki Ogata