Title:
両面研磨装置
Document Type and Number:
Japanese Patent JP4620884
Kind Code:
B2
More Like This:
Inventors:
Chuichi Miyashita
Tsuyoshi Hasegawa
Tsuyoshi Hasegawa
Application Number:
JP2001072528A
Publication Date:
January 26, 2011
Filing Date:
March 14, 2001
Export Citation:
Assignee:
Fujikoshi Machine Industry Co., Ltd.
International Classes:
B24B37/015; B24B37/12; H01L21/304
Domestic Patent References:
JP2000354957A | ||||
JP2000225563A |
Attorney, Agent or Firm:
Takao Watanuki
Horimai Kazuharu
Horimai Kazuharu