Title:
3次元デバイスシミュレーションプログラムおよび3次元デバイスシミュレーションシステム
Document Type and Number:
Japanese Patent JP4627268
Kind Code:
B2
Abstract:
A computer executable three-dimensional device simulation program product for the purpose of making a three-dimensional device simulation system which generates a three-dimensional model of a device by using a mask data performing the procedures of inputting cross-sectional feature information indicating a cross-sectional feature of an edge part of a mask, and calculating the three-dimensional model based on the mask data and input cross-sectional feature information, thereby enabling an easy generation of a complex three-dimensional feature by using pattern forming-use mask data when generating a three-dimensional feature model of a minute device.
Inventors:
Masayoshi Hashima
Yuichi Sato
Shuji Takeshita
Yuichi Sato
Shuji Takeshita
Application Number:
JP2006043812A
Publication Date:
February 09, 2011
Filing Date:
February 21, 2006
Export Citation:
Assignee:
富士通株式会社
International Classes:
G06F17/50; B81C99/00
Domestic Patent References:
| JP10041366A | ||||
| JP2001230323A | ||||
| JP2000207433A | ||||
| JP2001174974A |
Attorney, Agent or Firm:
Yoshiyuki Osuga
Motoaki Hisagi
Motoaki Hisagi